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发明名称
A FET sensor and production method thereof
摘要
申请公布号
KR100877246(B1)
申请公布日期
2009.01.13
申请号
KR20070043291
申请日期
2007.05.03
申请人
发明人
分类号
H01L29/82
主分类号
H01L29/82
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代理人
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