| 发明名称 |
Pump controller for precision pumping apparatus |
| 摘要 |
A pump controller and pump controlling method for dispensing a precise amount of low viscosity fluid are provided in which the problems of double dispenses and stuttered dispenses are avoided. In particular, the timing of the valves and motors in the pumping apparatus are adjusted to avoid these problems.
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| 申请公布号 |
US7476087(B2) |
申请公布日期 |
2009.01.13 |
| 申请号 |
US20050051576 |
申请日期 |
2005.02.04 |
| 申请人 |
ENTEGRIS, INC. |
发明人 |
ZAGARS RAYMOND A.;MCLOUGHLIN ROBERT F. |
| 分类号 |
F04B49/06;F04B7/00;F04B13/00;F04B43/02;F04B49/02 |
主分类号 |
F04B49/06 |
| 代理机构 |
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代理人 |
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