发明名称 Method for manufacturing thin film transistor
摘要 An object of the invention is to provide a method for manufacturing a thin film transistor in a self-aligning manner by using the droplet discharging method regardless of the accuracy of a discharge position for a droplet discharging device. In view of the object, an organic resin film or the like is applied and processed into a predetermined shape by etch-back, exposure, development and the like. By utilizing the organic resin film with the predetermined shape as a mask, a semiconductor layer containing an impurity of one conductivity type is etched. By utilizing the organic resin film with the predetermined shape, regions with different wettabilities are formed.
申请公布号 US7476572(B2) 申请公布日期 2009.01.13
申请号 US20050592527 申请日期 2005.03.15
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 MORISUE MASAFUMI;FUJII GEN
分类号 H01L21/00;H01L21/288;H01L21/3205;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/417;H01L29/45;H01L29/49;H01L29/786 主分类号 H01L21/00
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