发明名称 |
Method of detecting incomplete edge bead removal from a disk-like object |
摘要 |
A method of detecting incomplete edge bead removal from a disk-like object is disclosed. First a peripheral area of a disk-like reference object is imaged. Marks are then defined in the peripheral area of the reference object. Finally, images of peripheral areas of a plurality of disk-like objects of the same batch are recorded. The inspection of the disk-like objects is limited to the locations of the marks defined on the reference object.
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申请公布号 |
US7477370(B2) |
申请公布日期 |
2009.01.13 |
申请号 |
US20060390855 |
申请日期 |
2006.03.28 |
申请人 |
VISTEC SEMICONDUCTOR SYSTEMS GMBH |
发明人 |
MICHELSSON DETLEF;BACKHAUSS HENNING;WENIGER GERT |
分类号 |
G01N21/00;G03B27/32 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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