| 摘要 |
An illumination optical system for illuminating an object with light from a light source device comprises a plurality of optical surfaces. At least one of the optical surfaces is formed as a roughened surface and is arranged in a position other than closest to the object. Assuming that a total quantity of light emitted to the object by the illumination optical system is L, and a total quantity of light is L0 emitted by a reference optical system in which all the roughened surfaces of the illumination optical system are replaced with polished surfaces, the illumination optical system satisfies the following condition: <?in-line-formulae description="In-line Formulae" end="lead"?>0.70<=X<=0.95,<?in-line-formulae description="In-line Formulae" end="tail"?> where X=L/L0.
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