LIQUID CRYSTAL DISPLAY DEVICE

摘要

A liquid crystal display having a thin film transistor is provided to have highly reliable thin film transistors with excellent electric characteristics. In a liquid crystal display device having an inverted staggered thin film transistor, a method for forming an inverted staggered thin film transistor is following steps. A gate insulating film is formed over a gate electrode. A microcrystalline semiconductor film which functions as a channel formation region is formed over the gate insulating film. A buffer layer is formed over the microcrystalline semiconductor film. A pair of source and drain regions are formed over the buffer layer. A pair of source and drain electrodes are formed in contact with the source and drain regions so as to expose a part of the source and drain regions.