| 摘要 |
A coating apparatus for a photo sensitive material is provided to prevent a minute dust or a harmful gas from being attached by equipping exhaust damper and HEPA filter in each chamber. A pipe heater which supplies the heat in order to ossify the glass(1) in which the photo resident doctor is coated onto with drying is comprised of the inside of chamber bottom side. A fan is comprised at the lower place of the pipe heater in order to float minute dust and harmful gas. An HEPA filter collecting the toxic gas and a floating dust is comprised within the chamber in the inside of chamber. An exhaust damper(90) exhausts minute dust and toxic gas which are not collected by the HEPA filter. |
