METHOD OF CREATING MASK LAYOUT IMAGE, COMPUTER READABLE MEDIA INCLUDING A SEQUENCE OF PROGRAMMED INSTRUCTIONS STORED THEREON FOR CREATING THE SAME AND IMAGING SYSTEM

摘要

The method of creating the mask layout image, the computer readable media including a sequence of programmed instructions stored thereon for creating the same and the imaging system are provided to obtain the mask layout pattern having the high fidelity. A part or the entire target image transferred on the substrate is readable. The mask data set including a plurality of pixels is defined. A plurality of pixels has the predetermined penetration characteristic. The weighting function having the value in the critical range is defined. The convolution kernel defined with the illumination system is defined. By the weighting function and convolution kernel are applied. The mask layout image minimizing the image fitting function is generated.