CHEMICAL VAPOR DEPOSITION APPARATUS FOR FLAT DISPLAY

摘要

A chemical vapor deposition apparatus for a flat display is provided to exactly form a non-deposition section on the flat panel display by aligning shadow frame based on the susceptor. A susceptor(50) is installed within the chamber where the deposition producing is progressed. A shadow frame(70) is arranged in order to cover the surface task domain of the flat panel display loaded in susceptor in the deposition process. A non-deposition section is formed on the flat panel display. An align part is prepared in susceptor and a shadow frame. The shadow frame is arranged in susceptor based on susceptor and it is aligned.