| 摘要 |
An AGV(Automatic Guided Vehicle) is provided to reduce the rubbing force and the generation of a particle. A main body(111) forms the outer ring. A wheel(113) is connected to the bottom side of the main body and it is rotatable. A plurality of guide blocks is formed in the upper of the main body. A cassette(118) is settled on the predetermined position accurately. A robot arm(114) is additionally equipped in the upper surface center part of the main body. A robot arm is comprised of a plurality of slides(114a), and the driving shaft(114b) for rotating at 180° while moving slide top and bottom. |
