MULTIPLE-LAYER FILM AND METHOD FOR MANUFACTURING THE SAME

摘要

A multiple-layer film is provided to ensure excellent gas barrier effect by preventing the growth of defects and the connection of inter-layer defects through the repetition of an inorganic layer and organic layer. A multiple-layer film has a base material layer(320) and multiple layer(310). The multiple layer is equipped at, at least one side of the base material layer and has a sub layer formed from a single target material, more than 2 layers. The single target material comprises at least one material selected from Si, Al, Sn, Ti, Ni, W, their oxide, nitride and carbide.