发明名称 APPARATUS FOR COOLING A PLATE SHAPED WORKPIECE AND HEAT TREATMENT SYSTEM EQUIPPED WITH THE SAME
摘要 An apparatus for cooling a plate shaped workpiece and a heat treatment system including the same are provided to perform the heating/cooling of the workpiece. A cooling part is comprised of an upper cooling part(20) and a lower cooling part(30). A processed article distribution department(11) is formed between the upper cooling part and the lower cooling part. The upper cooling part and lower cooling part are positioned at both sides of the plate shape article(90) and perform the cooling process. The upper cooling part comprises an inner side plate(21) and an outer side plate(22). The external air passes through a first penetration hole(28) by operating a fan(29). The external air is ejected to interspaces(23, 33).
申请公布号 KR20090004701(A) 申请公布日期 2009.01.12
申请号 KR20080064201 申请日期 2008.07.03
申请人 ESPEC CORP. 发明人 KANDA TOSHIRO
分类号 H01J17/28;G02F1/1335 主分类号 H01J17/28
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