发明名称 Apparatus and method for contacting of test objects
摘要 The invention relates to methods for positioning of a substrate and contacting of the test object for testing with a test apparatus with an optical axis and corresponding devices. Thereby, the substrate is put on the holder. The substrate is positioned relative to the optical axis. A contact unit is also positioned relative to the optical axis, whereby the contact unit is positioned independent of the positioning activity of the substrate. Thereby, a flexible contacting of test objects on the substrate can be realized.
申请公布号 US7474108(B2) 申请公布日期 2009.01.06
申请号 US20060398052 申请日期 2006.04.05
申请人 APPLIED MATERIALS, GMBH 发明人 BRUNNER MATTHIAS
分类号 G01R31/305;G01R31/28;G01R31/302;G09G3/00 主分类号 G01R31/305
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