| 发明名称 |
Electroactive polymers for lithography |
| 摘要 |
Systems and methods for lithography include actuating an electroactive polymer member to position mask and/or substrate.
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| 申请公布号 |
US7473499(B2) |
申请公布日期 |
2009.01.06 |
| 申请号 |
US20050132736 |
申请日期 |
2005.05.19 |
| 申请人 |
SEARETE LLC |
发明人 |
HYDE RODERICK A.;MYHRVOLD NATHAN P. |
| 分类号 |
H01L41/08;H01L21/22;H01L21/683 |
主分类号 |
H01L41/08 |
| 代理机构 |
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