发明名称 |
Laser treatment apparatus |
摘要 |
A drain port and an exhaust port arranged at the bottom of a cup surrounding a substrate holding unit. A drainage tray is arranged below the cup so as to cover the moving area of the drain port when the substrate holding unit and the cup move in X-directions and Y-directions. An exhaust unit is arranged at a position corresponding to the position of the exhaust port of the cup when the substrate holding unit is in its spin-drying position. The exhaust unit is connected to the exhaust port to suck the interior of the cup when the spin-drying of the substrate is executed. The use of a flexible tube which is always connected to the exhaust port is no longer necessary.
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申请公布号 |
US7473321(B2) |
申请公布日期 |
2009.01.06 |
申请号 |
US20050213705 |
申请日期 |
2005.08.30 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
KOGA NORIHISA;KOGA SHINJI;YOSHITAKA NAOTO;NISHIYA AKIRA |
分类号 |
B05C11/00;B05B5/00;B05C13/02 |
主分类号 |
B05C11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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