发明名称 |
Method and apparatus for controlling a film formation process with multiple objectives |
摘要 |
A method includes defining a plurality of objectives for a film formation process and employing a control equation incorporating the plurality of objectives to generate at least one operating recipe parameter for the film formation process. A system includes a film formation unit and a process control unit. The film formation unit is adapted to perform a film formation process in accordance with an operating recipe. The process control unit is adapted to define a plurality of objectives for the film formation process and employ a control equation incorporating the plurality of objectives to generate at least one operating recipe parameter for the film formation process.
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申请公布号 |
US7473566(B1) |
申请公布日期 |
2009.01.06 |
申请号 |
US20040770682 |
申请日期 |
2004.02.03 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
PURDY MATTHEW A.;CHONG ROBERT J. |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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