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发明名称
MIKROMANIPULATOR MIT PIEZOELEKTRISCHEN BIEGEVORRICHTUNGEN
摘要
申请公布号
DE60229980(D1)
申请公布日期
2009.01.02
申请号
DE20026029980
申请日期
2002.11.29
申请人
CHIP-MAN TECHNOLOGY OY
发明人
KALLIO, PASI;ZHOU, QUAN;NOVOTNY, MAREK;KOIVO, HEIKKI;KUNCOVA, JOHANA;RONKANEN, PEKKA;TURUNEN, JUHA
分类号
B25J7/00;G02B21/32;H01L41/09;H02N2/02
主分类号
B25J7/00
代理机构
代理人
主权项
地址
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