Trägerstruktur für Gaslaserkammer und -Optik,申请号DE19996037867T-传众专利搜索

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发明名称	Trägerstruktur für Gaslaserkammer und -Optik
摘要
申请公布号	DE69937867(T2)	申请公布日期	2009.01.02
申请号	DE19996037867T	申请日期	1999.10.14
申请人	CYMER INC.	发明人	PAN, XIAOJIANG J.;HOWEY, JAMES K.;MIXON, CURTISS L.
分类号	G12B5/00;H01S3/02;G02B7/00;H01S3/03;H01S3/034;H01S3/225	主分类号	G12B5/00
代理机构		代理人
主权项
地址

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