| 摘要 |
A wafer transfer robot, having a robot hand which transfers a wafer in an improved driving manner by changing a driving force transfer device of the robot hand, is disclosed. The wafer transfer robot having at least robot hand to transfer a wafer includes an arm frame supported on an elevating shaft to vertically move the robot hand, wherein the robot hand includes a first robot arm rotatably supported on the arm frame, a second robot arm rotatably supported at an end of the first robot arm, a first driving device which rotates the first robot arm to rotate the robot hand, a second driving device which rotates the second robot arm to extend and contract the robot hand in a radial direction with the first driving device, and a controller which operates the first driving device and stops the second driving device when the robot hand is rotated, and operates both the first driving device and the second driving device at the same time when the robot hand is extended and contracted in a radial direction. The wafer transfer robot can be rotated and linearly move in a radial direction by providing the first driving device and the second driving device on the robot hand, thereby greatly decreasing the capacity of the motor serving as a driving device and reducing the cost.
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