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发明名称
清洁方法及装置
摘要
一种用以清洁一被支架固持之物件的方法,该方法包含如下步骤:施加一声波于该物件和支架;转动该物件和支架而使该物件上先前被该支架遮蔽之一区域曝露于该声波。
申请公布号
TW200900166
申请公布日期
2009.01.01
申请号
TW097115680
申请日期
2008.04.28
申请人
JCS英奇哥股份有限公司
发明人
姚福发
分类号
B08B3/12(2006.01);B08B1/02(2006.01);F26B15/02(2006.01);H01L21/304(2006.01)
主分类号
B08B3/12(2006.01)
代理机构
代理人
恽轶群;陈文郎
主权项
地址
新加坡
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