| 摘要 |
The invention relates to a method for producing especially doped layers for electronic, luminescent or photovoltaic components, especially OLEDs, where one or more liquid or solid starting materials evaporate in a source (11, 12, 13, 14) or are admixed as aerosol to a carrier gas and transported in this form to a deposition chamber (1) where they condense on a substrate (5), especially as a result of a temperature gradient, forming a doped matrix. In order to improve the doping of electronic, luminescent or photovoltaic layers, it is proposed that the doping occurs by modification of a starting material during its transport.
|
