发明名称 Method and Device for Controlling a Plurality of Actuators and an Illumination Device for Lithography
摘要 The present invention relates to a method and a device for controlling multiple actuators with a controller and multiple actuators controllable by the controller. At least several groups of actuators are individually controllable by the controller and to each actuator or each group of actuators is assigned at least one memory storage unit, which can store at least one parameter for controlling one or more actuators. At least two parameters are assigned to each actuator or each group of actuators, with one position of the actuator(s) being assigned to each of the parameters.
申请公布号 US2009002668(A1) 申请公布日期 2009.01.01
申请号 US20080146186 申请日期 2008.06.25
申请人 CARL ZEISS SMT AG 发明人 ROHE THOMAS;FISCHER JUERGEN;BACH FLORIAN
分类号 G03B27/54 主分类号 G03B27/54
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