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发明名称
具有线上粒子侦测功能之浸润式微影制程
摘要
一种浸润式微影制程系统包含:一个镜组单元自其末端投射出一图案至一晶圆上;一个防护罩单元用以限制浸润流体于该晶圆的一区域,使得浸润流体包围该镜组单元之末端;一个晶圆载物台用以放置该晶圆于接近该镜组单元之末端的位置;一个影像撷取装置偶合该晶圆载物台,且用以撷取该防护罩单元邻近该晶圆载物台之表面的影像;一个散射光侦测系统靠近该镜组单元之末端与该防护罩单元,且系用以侦测该晶圆载物台之表面上的粒子。
申请公布号
TW200900865
申请公布日期
2009.01.01
申请号
TW096143073
申请日期
2007.11.14
申请人
台湾积体电路制造股份有限公司
发明人
陈立锐;高蔡胜;彭其康
分类号
G03F7/20(2006.01);H01L21/027(2006.01)
主分类号
G03F7/20(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
新竹市新竹科学工业园区力行六路8号
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