| 摘要 |
A field emitter electron gun includes at least one field emitter cathode deposited on a substrate layer and configured to generate an electron beam. An extraction plate having an opening therethrough is positioned adjacent to the at least one field emitter cathode and is operated at a voltage so as to extract the electron beam out therefrom. A meshed grid is disposed between each of the at least one field emitter cathodes and the extraction plate. The meshed grid is configured to operate at a voltage so as to enhance an electric field at a surface of the at least one field emitter cathode. The meshed grid is a one-dimensional grid configured to focus the electron beam received from the at least one field emitter cathode into a desired spot size.
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