发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
摘要 In one aspect of the present invention, a manufacturing method of a semiconductor device may include performing an electrical test on a plurality of electronic components on a wafer, generating a mapping data set including category information representing categories of the respective electronic components based on the electrical test result and position information representing positions of the respective electronic components in the wafer, forming bumps on the plurality of electronic components at wafer level in various bump layouts employed in accordance with the categories assigned to the respective electronic components, with reference to the mapping data set, and dicing the wafer to separate the plurality of electronic components into individual chips, after forming the bumps.
申请公布号 US2009002006(A1) 申请公布日期 2009.01.01
申请号 US20080145785 申请日期 2008.06.25
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SUGIZAKI YOSHIAKI
分类号 G01R31/28;G01R31/02;H05K13/04 主分类号 G01R31/28
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