发明名称 MANUFACTURING APPARATUS AND DEVICE MANUFACTURING METHOD
摘要 A manufacturing apparatus includes a receiver which receives earthquake information containing the time at which earthquake vibration is expected to arrive at the manufacturing apparatus or information to predict the time, an acquisition unit which acquires status information indicating the status of the manufacturing apparatus, a countermeasure determination unit which determines an earthquake countermeasure on the basis of the earthquake information and the status information, and a countermeasure execution unit which executes the earthquake countermeasure, which is determined by the countermeasure determination unit, before the earthquake vibration arrives at the manufacturing apparatus.
申请公布号 US2009005998(A1) 申请公布日期 2009.01.01
申请号 US20080136416 申请日期 2008.06.10
申请人 CANON KABUSHIKI KAISHA 发明人 ORISHIMO YOSUKE
分类号 G01V1/00 主分类号 G01V1/00
代理机构 代理人
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