发明名称 DRIVING APPARATUS, HOLDING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD
摘要 The present invention provides a driving apparatus which drives an object, comprising a plurality of piezoelectric elements configured to drive a plurality of portions of the object, a plurality of voltage apply units configured to apply voltages to the plurality of piezoelectric elements, and a control unit configured to control the plurality of voltage apply units so that differences among the voltages applied to the plurality of piezoelectric elements do not exceed a predetermined value.
申请公布号 US2009001851(A1) 申请公布日期 2009.01.01
申请号 US20080100044 申请日期 2008.04.09
申请人 CANON KABUSHIKI KAISHA 发明人 YOSHIYUKI KOJI
分类号 H01L41/09 主分类号 H01L41/09
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