发明名称 Optical System and Method for Shaping a Profile of a Laser Beam
摘要 An optical system for shaping an incoming beam having a divergence with an angular distribution at least in a first direction comprises at least one angle selective optical element for clipping the angular distribution in the at least first direction. The approach according to the present invention bases on using an angle-selective device operated by the principle of total internal reflection to reduce divergence of the incoming beam, in contrast to a spatially-selective device as for example a field-stop or slit. The method according to the present invention has the advantage that no physical sharp edges have to be exposed at high energy densities. Thus, thermal impact and demands on the optical elements to withstand a high power laser beam are significantly reduced.
申请公布号 US2009002833(A1) 申请公布日期 2009.01.01
申请号 US20060097937 申请日期 2006.12.20
申请人 CARL ZEISS SMT AG 发明人 SHKLOVER VITALIY;MUENZ HOLGER;LE MAIRE MICHEL;HOESS CHRISTIAN
分类号 G02B27/09 主分类号 G02B27/09
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