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发明名称
集成电阻器电容器结构
摘要
本发明揭示一种电阻器电容器结构及制造方法。一电阻器电容器结构于一微电子电路内之至少两节点之间提供一电容。该电阻器电容器结构之一底板包括一电阻层,该电阻层进而于该电路内之一额外节点之间提供一电阻路径。该电阻器电容器结构可系形成于层间介电层顶部或内部。或者,该电阻层可用于填充位于层间介电层之间的一空腔,从而于该等层间介电层之间提供一电阻路径。
申请公布号
TW200901424
申请公布日期
2009.01.01
申请号
TW097110254
申请日期
2008.03.21
申请人
哈尼威尔国际公司
发明人
保罗S 菲克尼尔;葛登A 夏
分类号
H01L23/522(2006.01)
主分类号
H01L23/522(2006.01)
代理机构
代理人
陈长文
主权项
地址
美国
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