发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 This disclosure concerns a semiconductor memory device comprising a plurality of gate electrodes extending to a first direction; a reinforced insulation film extending to a second direction crossing the first direction, and connected to the adjacent gate electrodes; and an interlayer dielectric film provided between the adjacent gate electrodes, and having a void inside.
申请公布号 US2009001444(A1) 申请公布日期 2009.01.01
申请号 US20080132450 申请日期 2008.06.03
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUOKA YASUYUKI;KITO MASARU;AOCHI HIDEAKI;OKAMURA TAKAYUKI
分类号 H01L29/788;H01L21/28 主分类号 H01L29/788
代理机构 代理人
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