| 摘要 |
The wafer test device including the head socket for probe card connection and interface are provided to easily connect the connector with the head socket by adhering closely the connection pattern. The probe card connection head socket comprises the socket housing, the pinning bar(17), a plurality of connection pins(19), a pair of the interlocking lever, a pair of the drive lever. The socket housing has the slit for inserting the connector. The pinning bar has the socket housing. The connection pin is located inside the slit. The connection pin has the predetermined elastic force. The interlocking lever is installed in the same direction as the elastic force of the connection pin. The drive lever is installed in the direction which is orthogonal with the traveling direction of the respective interlocking lever inside the slit. The drive lever moves the interlocking lever.
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