| 摘要 |
<p>An illumination optical apparatus has a simple configuration and compact form, and is capable of individually illuminating two regions spaced from each other. The illumination optical apparatus comprises a beam splitting member (7) located at a position of an illumination pupil or at a position near the illumination pupil, and arranged for splitting an incident beam into a first light beam and a second light beam to form a first illumination region and a second illumination region, a first light-guide optical system (8, 10, 13) which guides the first light beam to the first illumination region and a second light-guide optical system (8, 10) which guides the second light beam to the second illumination region located apart from the first illumination region.</p> |
