| 发明名称 |
INDICATION OF THE END-POINT REACTION BETWEEN XEF2 AND MOLYBDENUM |
| 摘要 |
Embodiments of the present invention relate to methods and systems for making a microelectromechanical system comprising supplying an etchant to etch one or more sacrificial structures of the system. |
| 申请公布号 |
WO2009002788(A2) |
申请公布日期 |
2008.12.31 |
| 申请号 |
WO2008US67401 |
申请日期 |
2008.06.18 |
| 申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC.;RAFANAN, MARJORIO |
发明人 |
RAFANAN, MARJORIO |
| 分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
| 代理机构 |
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