发明名称 |
CATHODE HAVING ELECTRON PRODUCTION AND FOCUSING GROOVES, ION SOURCE AND RELATED METHOD |
摘要 |
<p>A cathode having electron production and focusing grooves for an ion source of an ion implanter system, the ion source and a related method are disclosed. In one embodiment, the cathode includes a working surface having a plurality of electron production and focusing grooves positioned therein. A repeller of the ion source may be similarly structured.</p> |
申请公布号 |
WO2009002692(A2) |
申请公布日期 |
2008.12.31 |
申请号 |
WO2008US66312 |
申请日期 |
2008.06.09 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.;BASSOM, NEIL, J. |
发明人 |
BASSOM, NEIL, J. |
分类号 |
H01L21/265;H01J37/08 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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