Surface electrode structure on ceramic multi-layer substrate and process for producing the same

摘要

In a surface electrode structure on a ceramic multi-layer substrate having on the surface SAW device mounting surface electrodes for mounting flip chips 30 as surface-acoustic-wave devices by gold-gold bonding and soldered parts mounting surface electrodes, at least the lowermost layer is made of a sintered silver conductor 51 which is partly buried in the ceramic multi-layer substrate 40, a nickel or a nickel alloy layer 52 being contained as an intermediate layer, and the topmost layer being a gold layer 53. Thus, it is provided a surface electrode structure on a ceramic multi-layer substrate that is suitable for both mounting of SAW devices by gold-gold bonding and mounting of other parts by soldering and which enable consistent mounting of individual parts using a ceramic multi-layer substrate to provide higher reliability.