OVER VOLTAGE PROTECTION DEVICE WITH AN AIR-GAP

摘要

An over voltage protection device comprising an air gap is presented to satisfy the requirement of industrial fields, by not limiting depth and width of the air gap by a process. According to an over voltage protection device comprising an air gap, a bottom substrate(100) is provided. A top substrate(130) is formed on the bottom substrate. A first trench is extended into the bottom substrate in order to extend an electrode layer(110). An air gap(150) is surrounded by the bottom substrate, the electrode layer and the top substrate.