发明名称 FOUP DOOR POSITIONING DEVICE FOR FOUP OPENER
摘要 <p>[PROBLEMS] A FOUP door positioning device for a FOUP opener, capable of being applied to any FOUP containers, low in cost, and having a simple positioning pin adjustment mechanism. [MEANS FOR SOLVING PROBLEMS] A flange-like section (where tapered section (13) is formed) of the base end of a positioning pin (10) is seated on a recess (31) of a port door (30). A straight section (11) of the positioning pin (10) is inserted into a pin insertion hole (23) of a suction pad (20), with an air drawing hole (14) of the positioning pin (10) and an air suction hole (33) of the port door (30) aligned with each other, and the suction pad (20) is screw-fastened to the port door (30). As a result, the suction pad (20) is attached to the outer surface of the port door (30) and that portion of the suction pad (20) which sank in the recess (31) presses the flange-like section of the base end of the positioning pin (10). A reinforcing metal plate (25) is embedded in a base body section (21) of the suction pad (20). ® KIPO & WIPO 2009</p>
申请公布号 KR20080114679(A) 申请公布日期 2008.12.31
申请号 KR20087016739 申请日期 2006.04.11
申请人 HIRATA CORPORATION 发明人 YOKOYAMA SINJI;MATSUSHITA YOUICHI
分类号 H01L21/677;H01L21/68 主分类号 H01L21/677
代理机构 代理人
主权项
地址