| 摘要 |
A lift pin assembly and a substrate processing apparatus including the same are provided to prevent vibration due to vertical movement of the lift pins. A lift pin assembly(200) includes a drive member(210), a horizontal stand(220), at least one pin support member(230a,230b), and a guide member(240). The horizontal stand is vertically lifted up and down by the drive member. The lift pin member is installed in a pin support member. The pin support member moves vertically along the ascent and descent movement of the horizontal stand. The guide member guides the movement of the pin support member.
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