APPARATUS FOR ANALYZING SPECIMEN

摘要

An apparatus for sample analysis is provided to minimize the shading effect due to the bi prism by using carbon nanotube and nanowire having thin diameter of a nano level. An apparatus for sample analysis comprises the field electrons layer, condensing lens(302), objective lens(305), bi prism, static power supply, hologram. The field electrons layer irradiate a electron beam by the field emission effect of the electronics(304). The condensing lens condenses the electron beam radiated from the field emission electron gun and irradiates the sample(303). The objective lens forms the enlargement phase of sample by the electron beam transmitted in sample. The bi prism uses a carbon nanotube(307) generating the interference fringe from the electron beam transmitted in the objective lens. The static power supply Supplies voltage to the bi prism. By using the interference fringe generated in the bi prism, hologram is formed.