发明名称 Increasing gas gauge pressure sensitivity using nozzle-face surface roughness
摘要 <p>A gas gauge (100) for sensing distance to an object (132) includes a gas supply system (102) and a nozzle (128) that supplies the gas from the gas supply system (102) to a space between the nozzle (128) and the object (132). For example, the gas supply system (102) supplies the gas with a flow rate that corresponds to a flow in a transitional region between laminar flow and turbulent flow. A surface of the nozzle (128) may be roughened so as to increase a friction factor across the surface, which increases gas pressure drop and also a gain of the nozzle (128). Noise generated by the increased flow rate may be attenuated using one or more strategically placed Helmholtz attenuators and/or snubbers (120).</p>
申请公布号 EP2009391(A1) 申请公布日期 2008.12.31
申请号 EP20080159163 申请日期 2008.06.27
申请人 ASML HOLDING N.V. 发明人 VOGEL, HERMAN
分类号 G01B13/12 主分类号 G01B13/12
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