| 摘要 |
<p>Intended is to provide a filming device, which can form a cover film of a homogeneous thickness easily and which is excellent in mass productivity. Therefore, the filming device comprises a base material holder (2) having a plurality of base material holding portions (7), and a filming evaporation source (3). The filming evaporation source (3) includes a cylindrical target (11), which has such an erosion region formed on its surface as includes two straight portions parallel to the center axis of the cylindrical target (11), and an arcuate portion joining the two ends of those straight portions, so that filming particles evaporate from that erosion region to the radially outer side of the cylindrical target (11). The base material holder (2) moves each base material (W) in the arranged direction of the base material holding portions (7) so that its concave filming faces (S) may be individually positioned at the filming positions confronting the erosion regions.</p> |
