SELECTABLE DEVICE OPTIONS FOR CHARACTERIZING SEMICONDUCTOR DEVICES

摘要

A system, method and program product that allows multiple devices (18) to be placed between pads (12, 14, 16) such that a Back End Of Line (BEOL) mask change can be used to select different device options. A system (58) is disclosed for implementing a testsite for characterizing devices in an integrated circuit technology, and includes: a system (60) for designing a plurality of device options (dl, d2, d3, d4) for a set of chip pads (12, 14, 16); a system (62) for designing a pseudo wiring layout for each of the plurality of device options; a system (64) for selecting one of the device options; a system (66) for mapping the pseudo wiring layout for a selected device option to a predetermined design level; and a system (50) for outputting a configured mask design at the predetermined design level having a wiring layout mapped for the selected device option.