EVAPORATION EQUIPMENT

摘要

A deposition apparatus is provided to deposit material with a uniform thickness and reduce a deposition time by supporting a plurality of an evaporation source in one movable plate and depositing the deposition material in a fixed substrate. A deposition apparatus includes a movable plate(110), a plurality of evaporation sources(120), and a drive unit(140). The movable plate is installed in a frame(100) to reciprocate. An evaporation source evaporates the deposition material to be deposited on the substrate. The evaporation source is installed in the movable plate in a direction crossing the moving direction of the movable plate. The drive unit reciprocates the moving plate.