| 摘要 |
<p>An anti-vibration unit has: an X-axis transducer generating elliptical vibration in drivers; a frame which is a fixing member having a holding portion for holding the X-axis transducer; an X frame having fixed thereto a slide element to which the drivers of the X-axis transducer are pressed and which moves in the X-axis direction with respect to the frame; a Y-axis transducer held by a holding portion provided in the X-frame and generating elliptical vibration in drivers; and a Y frame having fixed thereto a slide element to which the drivers of the Y-axis transducer are pressed and which moves in the Y-axis direction with respect to the X frame. The X-axis transducer and the Y-axis transducer have substantially same resonant frequency, and the slide elements differ in at least one of rigidity and density thereof, thereby providing a drive apparatus down-sized, large in driving force and high in efficiency.</p> |
