CRUCIBLE EXCHANGE APPARATUS FOR ORGANIC THIN FILM DEPOSITION PROCESS

摘要

A crucible exchange apparatus for organic layer deposition is provided to quickly and conveniently replace the used crucible with a new one within the vacuum chamber. A crucible exchange apparatus for organic layer deposition comprises a cell mounting plate(20) which is fixed at a certain height on a base(10) through a mounting unit and equipped with a plurality of crucible cells; a crucible mounting plate(30) which is connected with a horizontal moving unit to be horizontally movable with respect to the cell mounting plate, connected to the cell mounting plate through a first vertical moving unit, and equipped with a plurality of main crucibles(31) removably arranged at certain intervals and a plurality of auxiliary crucibles(32) removably arranged between the main crucibles; and a shield plate(40) which is connected to the base through a second vertical moving unit and selectively communicates with one of the main crucible and auxiliary crucible.