PROBE LOCATION PERCEPTION SYSTEM FOR PROBE CARD

摘要

A system for sensing a probe position for a probe card is provided to prevent a probe sensing error due to the accumulated error and measure the height of the probe accurately by measuring the position and the height of the probe after measuring the position and the height of the target unit firstly through a first camera and a second camera. A system for sensing a probe position for a probe card measures the height of the probe equipped in the probe card. The system for sensing the probe position for a probe card includes a target unit(100) and a camera unit(200). The target unit is equipped in the lower surface of a probe card holder fixing the probe card. The camera unit senses the position and the height of the target unit. The camera unit measures the height of the probe based on the height of the target unit.