| 摘要 |
A method of dynamically imaging, calibrating and measuring bump height and coplanarity of a plurality of bumps on a surface is disclosed. The method includes illuminating the plurality of bumps with multispectral light from at least one light source, and receiving light of a first wavelength at an imaging device such that a top view image of at least a portion of the plurality of bumps is captured. The light of the first wavelength is reflected off the plurality of bumps at a first angle from the surface. Light of a second wavelength is received at the imaging device such that at least one oblique side view image of at least a portion of the plurality of bumps is captured. The light of the second wavelength is reflected off the plurality of bumps at a second angle from the surface. The captured images are processed to determine absolute bump height and coplanarity. A corresponding apparatus is also disclosed.
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