| 摘要 |
A method of fabricating an organic EL device by which sealing films can be patterned, without using any wet process. The method has the steps of: preparing a substrate 1 on which a first electrode 2 has been formed and forming a laminated film 7 by laminating an organic layer 3 comprising a luminescent layer and a second electrode 4 on the first electrode 2 in this order; forming a first sealing film 5 which covers the whole region of the laminated film 7; forming on the surface of the first sealing film 5 a second sealing film 6 having an opening pattern; and patterning the first sealing film 5 by dry-etching the first sealing film 5 using the second sealing film 6 having the opening pattern as a mask. |
