| 发明名称 |
Method for making a diaphragm unit of a condenser microphone |
| 摘要 |
A method for making a diaphragm unit of a condenser microphone includes the steps of: forming a liftoff layer on a substrate; forming an insulator diaphragm film on the liftoff layer; and removing the liftoff layer from the diaphragm film and the substrate so as to separate the diaphragm film from the substrate.
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| 申请公布号 |
US7469461(B2) |
申请公布日期 |
2008.12.30 |
| 申请号 |
US20050298128 |
申请日期 |
2005.12.09 |
| 申请人 |
TAIWAN CAROL ELECTRONICS CO., LTD. |
发明人 |
CHANG CHAO-CHIH;HORNG RAY-HUA;TSAI JEAN-YIH;LAI CHUNG-CHIN;CHEN JI-LIANG |
| 分类号 |
H04R31/00 |
主分类号 |
H04R31/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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