| 摘要 |
A capacitive humidity sensor includes a detecting portion and a reference portion. The detecting portion includes a first sensor element, and a capacitance of the first sensor element varies in accordance with humidity. The reference portion includes a second sensor element and a capacitor. The second sensor element is connected to the first sensor element in series, and a capacitance of the second sensor element varies in accordance with the humidity. The capacitor has a constant capacitance relative to a humidity variation. The first sensor element has a gradient of a capacitance variation to the humidity variation, which is different from a gradient of the second sensor element.
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